Material:304S.S.
Surface: Electro-polished
Spec: 16″ spherical UHV chamber
Leakage rate<2x 10-10mbar.l/sec
Operation pressure<5 x10-10 torr
Flange concentricity < 0.5゚


High vacuum and ultra-high (UHV) vacuum chambers have been provided to the leading research and development institutions and vacuum coating OEM’s. We specialize in custom designs meeting customer specifications.
Chamber applications include surface science physics, photonics research, high magnetic field environments, chemical vapor deposition, physical vapor deposition and many others.